JPS6466U - - Google Patents
Info
- Publication number
- JPS6466U JPS6466U JP9273887U JP9273887U JPS6466U JP S6466 U JPS6466 U JP S6466U JP 9273887 U JP9273887 U JP 9273887U JP 9273887 U JP9273887 U JP 9273887U JP S6466 U JPS6466 U JP S6466U
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- package
- piezoresistor
- protecting
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9273887U JPS6466U (en]) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9273887U JPS6466U (en]) | 1987-06-18 | 1987-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6466U true JPS6466U (en]) | 1989-01-05 |
Family
ID=30954711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9273887U Pending JPS6466U (en]) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6466U (en]) |
-
1987
- 1987-06-18 JP JP9273887U patent/JPS6466U/ja active Pending